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Aluminium 

Aluminium (Al) is a nonmagnetic, ductile metal in the boron group. Al has applications in metal interconnects and is also used as a hardmask for some materials. Al and related films may be dry etched smoothly using Inductively Coupled Plasma (ICP) or deposited using Ion Beam Deposition (IBD) technology.

Process benefits

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More on IBD 了解更多信息
 

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