Aluminium Nitride

Aluminium Nitride (AlN) is widely used in mobile phone technology, it is an essential part of filters called acoustic wave sensors (SAWs). It's proporties make it ideally suited for this purpose while it can also be incorporated in some GaN based optoelectronic devices. It can be etched using Inductively Coupled Plasma (ICP) and Reactive Ion Etching (RIE).