White Papers

面向InP基激光器和光电二极管的前端等离子体工艺解决方案

High yield manufacturing of mesas in GaAs based VCSELs

Dry Etching of High Power VCSEL Array

InP laser diode device production: Defining the mesa

InP laser diode device production: Plasma deposition for maximum performance

InP laser diode device production: DFB Grating Etch for maximum performance

Advanced Endpoint Control Techniques for VCSEL Mesa Manufacture

Device fabrication for life sciences & biomedical applications: Barrier & biocompatible coatings

Device fabrication for life sciences & biomedical applications: Electric, Photonic and MEMS based devices

Device fabrication for life sciences & biomedical applications: Creation of hydrophobic, hydrophilic
and functional surfaces

Device fabrication for life sciences & biomedical applications: Microfluidics components fabrication

Atomic Layer Deposition and Atomic Layer Etching for GaN Power Electronics

非接触式SiC等离子抛光技术

World-Leading Plasma Process Solutions for Manufacturing SiC Power Devices

Atomic Layer Deposition (ALD): Towards Stable and Efficient Perovskite Solar Cells

Plasma Processing: The Essential Steps for High Performance GaN on SiC RF Devices