Silicon (Si) is a chemical element with symbol Si and atomic number 14.
A hard and brittle crystalline solid with a blue-grey metallic lustre, it is a tetravalent metalloid and .
Si may be dry etched using HBr based selective silicon etching with the Inductively Coupled Plasma (ICP) process technique.
Large process database on various process chemistries.
Competitive process results in a large number of applications from black Si formation to aspect ratio features.