Silicon (Si) is a chemical element with symbol Si and atomic number 14.
A hard and brittle crystalline solid with a blue-grey metallic lustre, it is a tetravalent metalloid and .
Poly Si can use different chemistries using pure and diluted silane. quality Poly Si over 2inch wafers.
Si may be dry etched using HBr based selective silicon etching with the Inductively Coupled Plasma (ICP) process technique.
Large process database on various process chemistries.
Competitive process results in a large number of applications from black Si formation to aspect ratio features.
Cryogenic Si etch
Cryogenic Si etch
selectivity cryo-silicon etch