牛津仪器集团成员
| Plasma Pro | ALD Tools | Ion Beam | Growth | ||||||
| 80 | 800 | 100 | 1000 | FlexAL | OpAL | Ionfab300 | Nanofab | ||
| Advanced Energy Paramount generator | X | ||||||||
| Automatic pressure control | X | X | |||||||
| Barcode reader wafer scanning software | X | X | X | X | X | X | X | X | |
| Comdel generator | X | X | X | ||||||
| Dual CM gauge switching | X | X | |||||||
| Gas pod | X | X | X | X | X | X | X | X | |
| Glassman power supply | X | ||||||||
| Hiden HMT RGA | X | ||||||||
| Integrated Gas Pod | X | ||||||||
| Light tower | X | X | X | X | X | X | X | X | |
| LN2 autochangeover unit | X | ||||||||
| Logviewer software | X | X | X | X | X | X | X | ||
| Optical end point detectors | X | X | X | X | X | X | |||
| SECS GEM automation | X | X | X | X | X | X | X | X | |
| Soft pump | X | X | X | ||||||
| TEOS liquid level sensing | X | X | |||||||
| Turbomolecular vacuum pump | X | X | X | X | X | X | X | ||
| Wide temperature range electrode | X | ||||||||
| X20 Control Systerm | X | X | X | X | X | ||||
TeamViewer software is now shipped as with new systems and can be obtained free of charge for existing installations.
© 牛津仪器 2019
公安机关备案号31010402003473
