Upgrades - 牛津仪器

Upgrades

Upgrades by system type:

	Plasma Pro					ALD Tools		Ion Beam	Growth
	80	800	100	1000	FlexAL	OpAL	Ionfab300	Nanofab
Advanced Energy Paramount generator			X
Automatic pressure control			X			X
Barcode reader wafer scanning software	X	X	X	X	X	X	X	X
Comdel generator	X	X	X
Dual CM gauge switching			X		X
Gas pod	X	X	X	X	X	X	X	X
Glassman power supply							X
Hiden HMT RGA							X
Integrated Gas Pod	X
Light tower	X	X	X	X	X	X	X	X
LN2 autochangeover unit			X
Logviewer software	X	X	X	X	X	X	X
Optical end point detectors	X	X	X		X	X		X
SECS GEM automation	X	X	X	X	X	X	X	X
Soft pump	X	X	X
TEOS liquid level sensing			X					X
Turbomolecular vacuum pump	X	X	X		X	X	X	X
Wide temperature range electrode			X
X20 Control Systerm	X	X	X		X		X

TeamViewer software is now shipped as with new systems and can be obtained free of charge for existing installations.