牛津仪器集团成员
| PlasmaPro系统 | 离子束 | CVD | ALD | |||
| 80 | 800 | 100 | Ionfab 300 | Nanofab | FlexAL | |
| AE Paramount 射频电源 | ✓ | |||||
| 自动压力控制 | ✓ | |||||
| 条形码阅读器晶片扫描软件 | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
| Comdel射频电源 | ✓ | ✓ | ✓ | |||
| 双薄膜规切换 | ✓ | ✓ | ||||
| 气体箱 | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
| Glassman电源 | ✓ | |||||
| 隐藏式HMT RGA | ✓ | |||||
| 整合式气体箱 | ✓ | |||||
| 灯塔 | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
| LN2自动转换装置 | ✓ | |||||
| 日志查看器软件 | ✓ | ✓ | ✓ | ✓ | ✓ | |
| 光学终点探测器 | ✓ | ✓ | ✓ | ✓ | ✓ | |
| PTIQ软件 | ✓ | ✓ | ✓ | |||
| SECS GEM自动化装置 | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
| 软抽气 | ✓ | ✓ | ✓ | |||
| TeamViewer 软件 | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
| TEOS液位感应 | ✓ | ✓ | ||||
| 涡轮分子真空泵 | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
| 宽温域电极 | ✓ | |||||
| X20控制系统 | ✓ | ✓ | ✓ | ✓ | ✓ | |
© 牛津仪器 2023
公安机关备案号31010402003473
