Plasma Pro | ALD Tools | Ion Beam | Growth | ||||||
80 | 800 | 100 | 1000 | FlexAL | OpAL | Ionfab300 | Nanofab | ||
Advanced Energy Paramount generator | X | ||||||||
Automatic pressure control | X | X | |||||||
Barcode reader wafer scanning software | X | X | X | X | X | X | X | X | |
Comdel generator | X | X | X | ||||||
Dual CM gauge switching | X | X | |||||||
Gas pod | X | X | X | X | X | X | X | X | |
Glassman power supply | X | ||||||||
Hiden HMT RGA | X | ||||||||
Integrated Gas Pod | X | ||||||||
Light tower | X | X | X | X | X | X | X | X | |
LN2 autochangeover unit | X | ||||||||
Logviewer software | X | X | X | X | X | X | X | ||
Optical end point detectors | X | X | X | X | X | X | |||
SECS GEM automation | X | X | X | X | X | X | X | X | |
Soft pump | X | X | X | ||||||
TEOS liquid level sensing | X | X | |||||||
Turbomolecular vacuum pump | X | X | X | X | X | X | X | ||
Wide temperature range electrode | X | ||||||||
X20 Control Systerm | X | X | X | X | X |
TeamViewer software is now shipped as with new systems and can be obtained free of charge for existing installations.