Diamond offers a set of characteristics that make it an interesting choice for a wide range of applications. It has the highest known conductivity making it attractive for heat removal, is chemically un-reactive and is the hardest known . It also has a wide (5.5eV) indirect bandgap meaning it has a breakdown voltage. It can be etched using Inductively Coupled Plasma (ICP), Reactive Ion Etching (RIE) or Ion Beam Etch (IBE).
Process achieves anistropic profile and smooth surfaces .
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