Bismuth Telluride

Bismuth Telluride (Bi₂Te₃) has applications in Peltier coolers and in energy harvesting (the conversion of differences into electrical energy). Bi₂Te₃ and related films can be dry etched by Inductively Coupled Plasma (ICP).

• Wafer size: up to 200mm
  • Product: PlasmaPro 100