Lithium Niobate

Lithium Niobate (LiNbO₃) is used in in Acoustic Wave (SAW) and related devices used in the communications industry. LiNbO₃ and it's related films may be dry etched using the Inductively Coupled Plasma (ICP) process.

• Wafer size: up to 200mm
  • Product: PlasmaPro 100 / PlasmaPro 100 Polaris