Plasma and Ion Beam Etching & Deposition Technology

Oxford Instruments Plasma Technology is a world leader in plasma process solutions, with a long history of providing the latest technology innovations in plasma processing. Through a deep understanding of our customers' requirements, we provide the solutions you need to get the most out of your device, every time. Coupled with robust production hardware, we are your partner for your journey from Lab to Fab.

We provide the most state-of-the-art solutions for plasma etching through RIE, ICP RIE, IBE, and ALE and plasma deposition through PECVD, ICP CVD, CVD, IBD and ALD.