LEADING SYSTEMS AND SOLUTIONS FOR VOLUME MANUFACTURING

WORLD-LEADING SOLUTIONS

Oxford Instruments is a world-leader of plasma etch and deposition systems and solutions for the compound semiconductor market. Our systems are used by many of the world-leading semiconductor device manufacturers, reliably producing thousands of high-performance devices every day.

Our experience in supplying device process solutions to the global production market has given us one of the strongest libraries of processes and capabilities in the world. With our knowledge, we are able to help you deliver the advanced, stable solutions you need to maximise your device performance.

TAKING YOU FROM LAB TO FAB

Over 500 years of combined experience in plasma etching and deposition
Proven track record in supplying production industry
Powerful systems designed specifically for volume device manufacturing
Global service & support with 24/7 service contracts available

MARKETS & APPLICATIONS

Our versatile, reliable and advanced production systems are enabling the next generation of technology across several markets and applications, from VR to electric vehicles and more.

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PRODUCTION SYSTEMS

Reliable. Trusted. Powerful. Our 200mm and multi-wafer batch processing systems offering excellent uniformity, high-throughput and low cost of ownership across a range of technologies.

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PLASMA TECHNOLOGIES

Explore our state-of-the-art solutions for plasma etching through RIE, ICP RIE, IBE, and ALE and plasma deposition through PECVD, ICP CVD, CVD, IBD and ALD.

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