This controller ensures very fast and accurate control. The system parameters are set up automatically within the tool on first start up after the upgrade has been fitted. The adaptive algorithm the controller continuously adapts to the process conditions (species of gas, gas flow) and thus ensures optimum control at any time.
The APC is used to restrict pumping during the dose step for a precursor. Often long exposure times are needed for slow-to-react precursors, or when deposition into aspect ratio features is required.Request pricing