Connect your plasma processing tools to your SECS GEM factory automation software

• Enable your plasma tools to be incorporated into your SECS GEM HOST software scheme
• Monitor and control the product and tool status for each tool
• Allows the tool to be fully included in all your current factory automation functions such as SPC, Preventative Maintenance Scheduling, Event notification etc

SECS GEM upgrade features:

• Industry protocol - straightforward Integration of equipment into existing GEM-SECS HOST workflow
• Reduces chance of operator errors – Automated control of equipment by factory HOST Automated real-time feedback on system status and recipe execution status from equipment to HOST
• Supports 200mm SEMI standards E4, E5, E30 and E37