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Upgrades
Wide temperature range electrode upgrade

Wide temperature range electrode upgrade

Significant improvements have been made to Instruments’ wide range electrodes.

Features of the electrode re-design upgrade

  • Increased structural strength of the electrode across the entire range (-150ºC to +400ºC)
    Delivers improved dimensional stability of the electrode, maintaining flatness of the upper and hence efective heat transfer to and from the wafer
  • Up-rated heating element to 2kW
    Delivers more heat to the electrode thereby reducing ramping times, increased element lifetime and improved uniformity over the upper
  • allows fitting of two probes
    control and over limit “watch dog” provision
  • Increased fluid flow capacity within the electrode
    Delivers increased cooling performance at the wafer, allowing a wider range of processing parameters to be employed
  • Re- of with increased dc bias capability
    Increased processing window with dc bias capability to 1kV, up from 500V limit of previous
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